Product
Semiconductor Etching Processes Key Components Silicon Parts / Gasket
Classification:
Product Name
Silicon Parts & Gasket。
Model
LAM FLEX series ELECTRODE / C SHROUD RING / FOUCUS RING, TEL VIGUS ELECTRODE, etc.
Application Direction
Mainly used parts for vacuum chamber in LAM / TEL / AMEC equipment for semiconductor etching process.
Product Features
The main cost of silicon parts is the same as that of wafers, and the vacuum chamber ensures stability, heat and chemical resistance, and the main material of the plasma-resistant insulator (Gasket) is silicon/graphite, which is resistant to high temperature, corrosion, and thermal insulation.
Product use
It is used to optimise the whole environment in the vacuum chamber of the etching equipment, to ensure thermal conductivity, electrical conductivity, vacuum, and is the main component of the vacuum chamber.
