Product

Product


OLED/LCD dry engraving process Lower electrode



Widely used in semiconductor, panel display, solar photovoltaic and other vacuum equipment environment or atmospheric environment.
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Product Name 

Lower Electrode

Model

INVENIA ECCP, WONIC IPS ICP, ECCP, TEL ECCP, ICP, PICP, YAC SUS, ICD SUS, Dual。

Application Direction

Widely used in semiconductor, panel display, solar photovoltaic and other vacuum equipment environment use or atmospheric environment use.

Product Features

Effectively solves the abnormalities such as Mura, Dimple, etc., which easily occur in the array process in the panel industry.

Product use

It is a core component of vacuum equipment, used as a carrier and gripper for ultra-clean thin film in atmospheric or vacuum environment.

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